As a new type of industry in China, the manufacturing process of semiconductor material is controlled strictly and high safety is absolutely required.  ETCH and CVD Series developed by ECC meet such strict requirement in domestic areas and needs in exporting overseas.

 

Feature:   

▲  The components and parts applied are UL certified or equivalent organization certified.

▲   Live parts are not access to operators when the door is open. Connections are all isolated by partitions made of poly carbon.

▲   Special measuring spot

▲   Emergency Off pushbuttons (EMO) are set on distributing cubicles and boxes for purpose of safety for persons and equipments.

 

Specs:    

▲   AC power supply distributing cubicle (AC RACK 2.0)

▲   AC distributing box (AC Box)

▲   System controlling box (Controller Box)

▲   DC distributing box (DC Box)

 

Technical parameters:

▲   Rated voltage:     208V

▲   Rated frequency:   50Hz

▲   Rated current:     400A

▲   DC power supply